Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Noriyuki Suetsugu and Kazuhisa Ishibasi and Takanori Yagita and Mitsuaki Kabasawa and Shiro Ninomiya,A Beam Quality Control Method in SAion Ion Implanter,2016 21st International Conference on Ion Implantation Technology (IIT),,IEEE,2016-09-01,,,1-4,https://cir.nii.ac.jp/crid/1874242817582848512,https://doi.org/10.1109/iit.2016.7882842