Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Hiroshi Mohri and Masamitsu Itoh and Takashi Adachi and Koji Murano and Kosuke Takai and Naoya Hayashi and Hideo Akizuki and Tsukasa Abe and Kazuki Hagihara and Tadahiko Takikawa,Study of CD variation at EUV mask fabrication occurred by electric conduction from top to back side,SPIE Proceedings,0277-786X,SPIE,2009-04-24,7379,,73792I,https://cir.nii.ac.jp/crid/1874242817650000000,https://doi.org/10.1117/12.824332