Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yoshiaki Sugizaki and Hiroaki Yamazaki and Tamio Ikehashi and Daiki Ono and Ryunosuke Gando and Kei Masunishi and Hideki Shibata and Yumi Hayashi and Naofumi Nakamura and Yasushi Tomizawa,Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator,IEEE SENSORS 2014 Proceedings,,IEEE,2014-11-01,,,970-973,https://cir.nii.ac.jp/crid/1874242817706831744,https://doi.org/10.1109/icsens.2014.6985164