著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Teruo Fujii and Alexis Debray and Hiroyuki Fujita and Eric Leclerc and Nicolas Tiercelin,Silicon based optical scanner using PDMS as torsion springs,2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682),,IEEE,2004-06-03,,,95-96,https://cir.nii.ac.jp/crid/1874242817890879488,https://doi.org/10.1109/omems.2003.1233484