Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Jiro Temmyo and Toru Aoki and Atsushi Nakamura and Yoshimi Shimizu and Satoshi Shigemori,ZnO growth using remote plasma metalorganic chemical vapor deposition,physica status solidi (c),1610-1634,Wiley,2004-03-01,1,,880-883,https://cir.nii.ac.jp/crid/1874242817914016640,https://doi.org/10.1002/pssc.200304178