URL,Title,Author,University,Degree year,Grant ID,Types of degree,DOI,URL(DOI)
https://cir.nii.ac.jp/crid/1910020910729993216,Molecular dynamics simulation of the plasma-surface interaction during plasma etching processes,"Ohta, Hiroaki",Kyoto University,2004,甲第11119号,博士(エネルギー科学),,