著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Patrick Mc Kearney and Ingo Lebershausen and Sören Schäfer,Improving the processing efficiency of femtosecond laser sulfur hyperdoping of silicon by diffractive beam shaping,Journal of laser micro/nanoengineering,18800688,Japan Laser Processing Society,2023-09,18(2),,,https://cir.nii.ac.jp/crid/2050307417136804480,https://doi.org/10.2961/jlmn.2023.02.2003