著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Katsunobu Nishihara and Shinsuke Fujioka and Koji Tsubakimoto,Development of laser-produced plasma EUV light source for lithography,Annual progress report,,大阪大学,2008-02,2007年度,,,https://cir.nii.ac.jp/crid/2051996266986342912,