[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Characterization of High-Speed Microactuator Utilizing Shape Memory Alloy Thin Films

Bibliographic Information

Title
Characterization of High-Speed Microactuator Utilizing Shape Memory Alloy Thin Films
Author
M.Tomozawa, S.Miyazaki 他2名

Journal

Articles

See more

Research Data

See more

Books

See more

Dissertations

See more

Research Projects

See more

Products

See more

Details

  • CRID
    1010000781776913292
  • Article Type
    journal article
  • Data Source
    • KAKEN
Back to top