[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Control of the nucleation density of si quantum dots by remote hydrogen plasma treatment

Bibliographic Information

Title
Control of the nucleation density of si quantum dots by remote hydrogen plasma treatment
Author
K.Makihara, H.Deki, H.Murakami, S.Higashi, S.Miyazaki

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Details

  • CRID
    1010000781801427595
  • Article Type
    journal article
  • Data Source
    • KAKEN
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