[Updated on Oct. 4] Integration of CiNii Articles into CiNii Research from April 1, 2022

Actinic Mask Inspection Using an EUV Microscope -Preparation of a Mirau Interferometer for Phase-defect Detection-

Bibliographic Information

Title
Actinic Mask Inspection Using an EUV Microscope -Preparation of a Mirau Interferometer for Phase-defect Detection-
Author
K.Hamamoto, Y.Tanaka, H.Kawashima, S.Y.Lee, N.Hosokawa, N.Sakaya, M.Hosoya, T.Shoki, T.Watanabe, H.Kinoshita

Journal

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Details

  • CRID
    1010000781801731217
  • Article Type
    journal article
  • Data Source
    • KAKEN
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