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PLD法によるTiO_2多層薄膜作製とその特性

  • IKEGAMI Tomoaki
    Kumamoto University, Graduate School of Science and Technology, Professor
  • EBIHARA Kenji
    Kumamoto University, Graduate School of Science and Technology, Professor

Bibliographic Information

Title
PLD法によるTiO_2多層薄膜作製とその特性
Author
モシャラフブイヤン, 新宮啓司, 池上知顯, 蛯原健治

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Details

  • CRID
    1010000781805379340
  • Article Type
    journal article
  • Data Source
    • KAKEN
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