[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field

Bibliographic Information

Title
Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field
Author
H.Fujiyama, H.Uchida, Y.Nitta, T.Nakatani

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Details

  • CRID
    1010000781874289160
  • Article Type
    journal article
  • Data Source
    • KAKEN
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