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Development of Thin-film Resistors Fabricated on an AlN Substrate for High-Voltage AC-DC Transfer Standards

Bibliographic Information

Title
Development of Thin-film Resistors Fabricated on an AlN Substrate for High-Voltage AC-DC Transfer Standards
Author
Hiroyuki Fujiki, Yasutaka Amagai and Kenjiro Okawa

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Details

  • CRID
    1010000781912199040
  • Article Type
    journal article
  • Data Source
    • KAKEN
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