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Fabrication of Si Probe and SiO_2 Tube Array Chip Integrated with On-chip Circnits for Neural Interface Devices

Bibliographic Information

Title
Fabrication of Si Probe and SiO_2 Tube Array Chip Integrated with On-chip Circnits for Neural Interface Devices
Author
K. Takei, T. Kawashima, H. Takao, K. Sawada, and M. Ishida

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Details

  • CRID
    1010000781930307226
  • Article Type
    journal article
  • Data Source
    • KAKEN
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