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Strain relaxation and surface morphology of ultra thin high Ge content SiGe epilayers grown on Si(001) substrate

Bibliographic Information

Title
Strain relaxation and surface morphology of ultra thin high Ge content SiGe epilayers grown on Si(001) substrate
Author
M.Myronov, Y.Shiraki

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Details

  • CRID
    1010000781988995077
  • Article Type
    journal article
  • Data Source
    • KAKEN
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