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Erosion behavior of carbon deposition layers formed by hydrogen plasm a sputtering

Bibliographic Information

Title
Erosion behavior of carbon deposition layers formed by hydrogen plasm a sputtering
Author
T., Okamura・K., Katayama・K., Imaoka・Y., Uchida・M., Nishikawa・S., Fukada

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Details

  • CRID
    1010000781989373186
  • Article Type
    journal article
  • Data Source
    • KAKEN
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