[Updated on Oct. 4] Integration of CiNii Articles into CiNii Research from April 1, 2022

Micro-and Nano-Scale Fabrication of Fluorinated Polymers by Direct Etching Using Focused Ion Beam

Bibliographic Information

Title
Micro-and Nano-Scale Fabrication of Fluorinated Polymers by Direct Etching Using Focused Ion Beam
Author
N. Fukutake, N. Miyoshi, Y. Takasawa, T. Urakawa, T. Gowa, K. Okamoto, A. Oshima, S. Tagawa, M. Washio

Journal

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Details

  • CRID
    1010000782009357578
  • Article Type
    journal article
  • Data Source
    • KAKEN
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