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Influence of sputtering parameters on the crystallinity and crystal orientation of AIN layers deposited by RF sputtering using the AIN target

Bibliographic Information

Title
Influence of sputtering parameters on the crystallinity and crystal orientation of AIN layers deposited by RF sputtering using the AIN target
Author
Z.Vashaei

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Details

  • CRID
    1010000782053706639
  • Article Type
    journal article
  • Data Source
    • KAKEN
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