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駆動力制御窒化法による窒化アルミニウム単結晶膜の作製

Bibliographic Information

Title
駆動力制御窒化法による窒化アルミニウム単結晶膜の作製
Author
箱守明

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Details

  • CRID
    1010000782053706763
  • Article Type
    journal article
  • Data Source
    • KAKEN
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