[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Measurement of interface-state-density distribution near conduction band at interface between atomic-layer-deposited Al2O3 and silicon-doped InAlN

Bibliographic Information

Title
Measurement of interface-state-density distribution near conduction band at interface between atomic-layer-deposited Al2O3 and silicon-doped InAlN
Author
M. Akazawa, M. Chiba, and T. Nakano

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Details

  • CRID
    1010000782208906118
  • Article Type
    journal article
  • Data Source
    • KAKEN
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