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Formation mechanism of concave by dielectric breakdown on silicon carbide metal-oxide-semiconductor capacitor

Bibliographic Information

Title
Formation mechanism of concave by dielectric breakdown on silicon carbide metal-oxide-semiconductor capacitor
Author
S. Sato, K. Yamabe, T. Endoh, M. Niwa

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Details

  • CRID
    1010000782243758592
  • Article Type
    journal article
  • Data Source
    • KAKEN
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