[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Development of a Compact X-ray Sources and Super-sensitization of Photo Resists for Soft X-ray Imaging

Bibliographic Information

Title
Development of a Compact X-ray Sources and Super-sensitization of Photo Resists for Soft X-ray Imaging
Author
T. Gowa, N. Fukutake, Y. Hama, K. Hizume, T. Kashino, S. Kashiwagi, R. Kuroda, A. Masuda, A. Oshima, T. Saito, K. Sakaue, K. Shinohara, T. Takahashi, T. Urakawa, K. Ushida, M. Washio

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Details

  • CRID
    1010000782464984065
  • Article Type
    journal article
  • Data Source
    • KAKEN
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