[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Structure and Properties of TiCuN Films Prepared by ICP Assisted Magnetron Sputtering

Bibliographic Information

Title
Structure and Properties of TiCuN Films Prepared by ICP Assisted Magnetron Sputtering
Author
Z.G.Li

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Details

  • CRID
    1010282256734500503
  • Article Type
    journal article
  • Data Source
    • KAKEN
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