[Updated on Oct. 4] Integration of CiNii Articles into CiNii Research from April 1, 2022

Vertical-scanning profilometry having nanometric height resolution and scanning speed more than 40μm/s

Bibliographic Information

Title
Vertical-scanning profilometry having nanometric height resolution and scanning speed more than 40μm/s
Author
M.Adachi

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Details

  • CRID
    1010282256756342789
  • Article Type
    journal article
  • Data Source
    • KAKEN
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