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Simulation of Radio Frequency Microplasma in Ar Dielectric Discharge with Coplanar Electrodes

Bibliographic Information

Title
Simulation of Radio Frequency Microplasma in Ar Dielectric Discharge with Coplanar Electrodes
Author
F.Tochikubo, S.Uchida

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Details

  • CRID
    1010282256845657987
  • Article Type
    journal article
  • Data Source
    • KAKEN
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