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Quantum Chemical Molecular Dynamics Analysis of the Effect of Oxygen Vacancies and Strain on Dielectric Characteristic of HfO2-x Films

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Title
Quantum Chemical Molecular Dynamics Analysis of the Effect of Oxygen Vacancies and Strain on Dielectric Characteristic of HfO2-x Films
Author
Yuta Ito

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Details

  • CRID
    1010282256847340552
  • Article Type
    journal article
  • Data Source
    • KAKEN
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