[Updated on Oct. 4] Integration of CiNii Articles into CiNii Research from April 1, 2022

Plasma anisotropic CVD of high purity Cu using Cu(hfac)_2

Bibliographic Information

Title
Plasma anisotropic CVD of high purity Cu using Cu(hfac)_2
Author
Masaharu Shiratani, Takao Kaji, Kazunori Koga, Yukio Watanabe, Tomohiro Kubota, Seiji Samukawa

Journal

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Details

  • CRID
    1010282256851295617
  • Article Type
    journal article
  • Data Source
    • KAKEN
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