[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Observation of Si Emission during Thermal Oxidation of Si(001) with High-Resolution RBS Nuclear Instruments and Methods in Physics

Bibliographic Information

Title
Observation of Si Emission during Thermal Oxidation of Si(001) with High-Resolution RBS Nuclear Instruments and Methods in Physics
Author
S.Hosoi, K.Nakajima, M.Suzuki, K.Kimura, Y.Shimizu, S.Fukatsu, K.M.Itoh, M.Uematsu, H.Kageshima, K.Shiraishi

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Details

  • CRID
    1010282256851299214
  • Article Type
    journal article
  • Data Source
    • KAKEN
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