[Updated on Oct. 4] Integration of CiNii Articles into CiNii Research from April 1, 2022

Texture investigation in the trench depth direction of very narrow copper wires less than 100nm wide using electron backscatter diffraction

Bibliographic Information

Title
Texture investigation in the trench depth direction of very narrow copper wires less than 100nm wide using electron backscatter diffraction
Author
K.P.Khoo, 大貫仁

Journal

Citations (0)*help

See more

References(0)*help

See more

Related Articles

See more

Related Data

See more

Related Books

See more

Related Dissertations

See more

Related Projects

See more

Related Products

See more

Details

  • CRID
    1010282257005674117
  • Article Type
    journal article
  • Data Source
    • KAKEN
Back to top