[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

High-integrity finishing of 4H-SiC (0001) by plasma-assisted polishing

Bibliographic Information

Title
High-integrity finishing of 4H-SiC (0001) by plasma-assisted polishing
Author
Kazuya Yamamura, Tatsuya Takiguchi, Masaki Ueda, Azusa N. Hattori, Nobuyuki Zettsu

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Details

  • CRID
    1010282257011688704
  • Article Type
    journal article
  • Data Source
    • KAKEN
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