[Updated on Oct. 4] Integration of CiNii Articles into CiNii Research from April 1, 2022

Electrical Properties of r-N Films Deposited by Sputtering Application to Cryogenic Temperature Sensors

Bibliographic Information

Title
Electrical Properties of r-N Films Deposited by Sputtering Application to Cryogenic Temperature Sensors
Author
K.Satoh, Y.Kakehi, M.Uno, Y.Sakurai, T.Yotsuya, T.Ishida

Journal

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Details

  • CRID
    1010282257119615756
  • Article Type
    journal article
  • Data Source
    • KAKEN
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