[Updated on Oct. 4] Integration of CiNii Articles into CiNii Research from April 1, 2022

Characterization of (111)-oriented Ti1-xAlxN Thin Films on Monocrystalline AlN

Bibliographic Information

Title
Characterization of (111)-oriented Ti1-xAlxN Thin Films on Monocrystalline AlN
Author
Y. Kasukabe, H. Shimoda, S. Yamamoto and M. Yoshikawa

Journal

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Details

  • CRID
    1010282257232402304
  • Article Type
    journal article
  • Data Source
    • KAKEN
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