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Characterization of strained Si wafers by X-ray diffraction techniques

Bibliographic Information

Title
Characterization of strained Si wafers by X-ray diffraction techniques
Author
T. Shimura, K. Kawamura, M. Asakawa, H. Watanabe, K. Yasutake, A. Ogura, K. Fukuda, O. Sakata, S. Kimura, H. Edo, S. Iida, and M. Umeno

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Details

  • CRID
    1010282257417396636
  • Article Type
    journal article
  • Data Source
    • KAKEN
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