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Evaluation of the dominant factor for electro migration in sputtered high purity Al films, Trans. ASME

Bibliographic Information

Title
Evaluation of the dominant factor for electro migration in sputtered high purity Al films, Trans. ASME
Author
X. Zhao, M. Saka, M. Yamashita, F. Togoh

Journal

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Details

  • CRID
    1010282257418624776
  • Article Type
    journal article
  • Data Source
    • KAKEN
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