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Si(100)ウエハを用いた極薄SiN自立メンブレンの作製

Bibliographic Information

Title
Si(100)ウエハを用いた極薄SiN自立メンブレンの作製
Author
笹川芳晃

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Details

  • CRID
    1010282257429389700
  • Article Type
    journal article
  • Data Source
    • KAKEN
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