[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Fabrication of Site-Controlled Tunnel Pits with High Aspect Ratios by Electrochemical Etching of Al Using Masking Film, Electrochem.

Bibliographic Information

Title
Fabrication of Site-Controlled Tunnel Pits with High Aspect Ratios by Electrochemical Etching of Al Using Masking Film, Electrochem.
Author
K. Nishio, T. Fukushima, A. Takeda, H. Masuda

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Details

  • CRID
    1010282257435591577
  • Article Type
    journal article
  • Data Source
    • KAKEN
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