[Updated on July 12] Integration of CiNii Articles into CiNii Research from April 1, 2022

Characterization of quaternary (Cr,Al) N based films synthesized by cathodic arc method

Bibliographic Information

Title
Characterization of quaternary (Cr,Al) N based films synthesized by cathodic arc method
Author
Hiroyuki Hasegawa, Kazuhito Ohashi, Shinya Tsukamoto, Takashi Sato, Tetsuya Suzuki

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Details

  • CRID
    1010282257462702977
  • Article Type
    journal article
  • Data Source
    • KAKEN
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