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有機金属分解(MOD)法によるナノ構造無機化合物薄膜コーティング技術

Bibliographic Information

Title
有機金属分解(MOD)法によるナノ構造無機化合物薄膜コーティング技術
Author
菅原 徹, 渡邊 厚介

Journal

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Details

  • CRID
    1011412880721869824
  • Article Type
    journal article
  • Data Source
    • KAKEN
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