- Development of Pulse Nd:YAG Laser Deposition system for Soft-FerrieFilm
It was reported preparation of soft-ferrite film on the room-temperature substrate by pulse laser deposition (PLD) method with excimer laser. Thereafter, soft-ferrite film preparation by PLD method is widely noticed. But excimer laser is difficult to keep maintained by small laboratory, because of the running costs of excimer laser are very expensive. On the other hand, Nd : YAG laser has advantages of low running costs, high energy-stability and so on. So, PLD system with Nd : YAG laser was developed for soft-ferrite film preparation. In this report, we introduce details of the developed pulse Nd : YAG laser deposition system.
identifier:長崎大学工学部研究報告 Vol.32(59) p.75-78, 2002
- 長崎大学工学部研究報告 = Reports of the Faculty of Engineering, Nagasaki University
長崎大学工学部研究報告 = Reports of the Faculty of Engineering, Nagasaki University 32 (59), 75-78, 2002-07