- Development of high temperature silicone-ladder-polymer
- タイネツセイ ハシゴガタ シリコーン ジュシ ノ カイハツ
type:本学関連学会 Related Societies
High purity high molecular weight poly (phenylsilsesquioxane) (PPSQ) has been synthesized. Weight average molecular weight is larger than 10^4. The content of impurity ion, that is, Na+, K+etc. is less than 0.5 ppm. Specimen films were prepared by solvent casting method. The thermaldecomposition temperature of the specimen cured at 350 ℃ for 60 min is 500 ℃ in air. The storage modulus for the cured specimen is 9.OX10^10dyne/㎠ at 25 ℃, and 3.0X10^9dyne/㎠ at 250 ℃. Break down field of the specimen is 4 ∼ 5 MV/cm。These results indicate that PPSQ is high heat resistant polymer. The resist image was prepared in PPSQ film spin-coated on Si wafer with organic solvents.
電気材料技術雑誌 3 57-61, 1994-10-01