[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Combinatorial Masked Deposition : Simple Method to Control Deposition Flux and Its Spatial Distribution

Bibliographic Information

Title
Combinatorial Masked Deposition : Simple Method to Control Deposition Flux and Its Spatial Distribution
Author
S.Noda et al.

Journal

  • 225

    225 372-, 2004

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Details

  • CRID
    1010000781592746245
  • Article Type
    journal article
  • Data Source
    • KAKEN

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