Dependence of stacking fault and twin densities on deposition conditions during 3C-SiC heteroepitaxial growth on on-axis Si(100) substrates
Bibliographic Information
- Title
- Dependence of stacking fault and twin densities on deposition conditions during 3C-SiC heteroepitaxial growth on on-axis Si(100) substrates
- Author
- Jungheum Yun, T.Takahashi, Y.Ishida, H.Okumura
Journal
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- Journal of Crystal Growth (ELSEVIER) 掲載予定
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Journal of Crystal Growth (ELSEVIER) 掲載予定
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Details 詳細情報について
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- CRID
- 1010000781605401473
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- Article Type
- journal article
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- Data Source
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- KAKEN