Performance of nanomanipulator fabricated on glass capillary by focused-ion-beam chemical vapor deposition
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- 米谷 玲皇
- The University of Tokyo
Bibliographic Information
- Title
- Performance of nanomanipulator fabricated on glass capillary by focused-ion-beam chemical vapor deposition
- Author
- Reo Kometani
Journal
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- Journal of Vacuum Science & Technology B23
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Journal of Vacuum Science & Technology B23 298-301, 2005
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Details 詳細情報について
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- CRID
- 1010000781620817412
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- Article Type
- journal article
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- Data Source
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- KAKEN