Performance of nanomanipulator fabricated on glass capillary by focused-ion-beam chemical vapor deposition
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- 米谷 玲皇
- 東京大学
書誌事項
- タイトル
- Performance of nanomanipulator fabricated on glass capillary by focused-ion-beam chemical vapor deposition
- 著者
- Reo Kometani
収録刊行物
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- Journal of Vacuum Science & Technology B23
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Journal of Vacuum Science & Technology B23 298-301, 2005