Three-dimensional high-performance nano-tools fabricated by using focused-ion-beam chemical vapor deposition
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- 米谷 玲皇
- 東京大学
書誌事項
- タイトル
- Three-dimensional high-performance nano-tools fabricated by using focused-ion-beam chemical vapor deposition
- 著者
- Reo Kometani
収録刊行物
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- Nuclear Instruments and Methods in Physics Research B232
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Nuclear Instruments and Methods in Physics Research B232 362-366, 2005