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Online Measurement of Micro-Aspheric Surface with Compensation of Scanning Error
Bibliographic Information
- Title
- Online Measurement of Micro-Aspheric Surface with Compensation of Scanning Error
- Author
- Y. Arai, A. Shibuya, Y. Yoshikawa, W. Gao
Journal
-
- Key Engineering Materials 381-382
-
Key Engineering Materials 381-382 175-178, 2008
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Details 詳細情報について
-
- CRID
- 1010000781684246272
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN