Design Methodology for La_2O_3-Based Ternary Higher-k Dielectrics

Bibliographic Information

Title
Design Methodology for La_2O_3-Based Ternary Higher-k Dielectrics
Author
K.Kita, Yi Zhao, Y.Yamamoto, K.Kyuno, A.Toriumi

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Details 詳細情報について

  • CRID
    1010000781772371864
  • Article Type
    journal article
  • Data Source
    • KAKEN

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