Design Methodology for La_2O_3-Based Ternary Higher-k Dielectrics
書誌事項
- タイトル
- Design Methodology for La_2O_3-Based Ternary Higher-k Dielectrics
収録刊行物
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- Ext.Abst. 2005 Int.Conf. on Solid State Devices and Materials (SSDM)
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Ext.Abst. 2005 Int.Conf. on Solid State Devices and Materials (SSDM) 252-253, 2005