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Design Methodology for La_2O_3-Based Ternary Higher-k Dielectrics
Bibliographic Information
- Title
- Design Methodology for La_2O_3-Based Ternary Higher-k Dielectrics
- Author
- K.Kita, Yi Zhao, Y.Yamamoto, K.Kyuno, A.Toriumi
Journal
-
- Ext.Abst. 2005 Int.Conf. on Solid State Devices and Materials (SSDM)
-
Ext.Abst. 2005 Int.Conf. on Solid State Devices and Materials (SSDM) 252-253, 2005
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Details 詳細情報について
-
- CRID
- 1010000781772371864
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
