Correlation between Oxidation Process of Al Film for Magnetic Tunnel Junctions and Oxidizing Species in the Microwave Excited Plasma
書誌事項
- タイトル
- Correlation between Oxidation Process of Al Film for Magnetic Tunnel Junctions and Oxidizing Species in the Microwave Excited Plasma
- 著者
- S.Yoshimura et al.
収録刊行物
-
- Journal of Magnetic Society Japan 27
-
Journal of Magnetic Society Japan 27 1130-1134, 2003