Correlation between Oxidation Process of Al Film for Magnetic Tunnel Junctions and Oxidizing Species in the Microwave Excited Plasma

Bibliographic Information

Title
Correlation between Oxidation Process of Al Film for Magnetic Tunnel Junctions and Oxidizing Species in the Microwave Excited Plasma
Author
S.Yoshimura et al.

Journal

Related Projects

See more

Details 詳細情報について

  • CRID
    1010000781776787343
  • Article Type
    journal article
  • Data Source
    • KAKEN

Report a problem

Back to top