Young's Modulus Measurement of Nanopillars for Various Materials Fabrication by Focused-Ion-Beam Chemial-Vapor-Deposition
書誌事項
- タイトル
- Young's Modulus Measurement of Nanopillars for Various Materials Fabrication by Focused-Ion-Beam Chemial-Vapor-Deposition
収録刊行物
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- The Institute of Electrical Engineers Conferense data MSS-05-1
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The Institute of Electrical Engineers Conferense data MSS-05-1 1-4, 2005